Stress and thermal expansion of β-SiC films by the vibrating-membrane method
- B.S. Berry
- W.C. Pritchet
- et al.
- 2011
- Journal of Materials Research
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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3 results for R.I. Fuentes
Enhanced nucleation and growth of diamond on SiC by plasma enhanced chemical vapor deposition using thin metal films
- J.E. Yehoda
- R.I. Fuentes
- et al.
- 1992
- Applied Physics Letters
Light scattering properties of x-ray lithography mask substrates
- J.R. Maldonado
- Y. Vladimirsky
- et al.
- 1991
- Microelectronic Engineering