Ge segregation in SiGe/Si heterostructures and its dependence on deposition technique and growth atmosphere
- D.A. Grützmacher
- T.O. Sedgwick
- et al.
- 1993
- Applied Physics Letters
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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17 results for A.R. Powell
Atomic layer doping for Si
- D.A. Grützmacher
- K. Eberl
- et al.
- 1993
- Thin Solid Films
Growth of SiGe/Si quantum well structures by atmospheric pressure chemical vapor deposition
- D.A. Grützmacher
- T.O. Sedgwick
- et al.
- 1993
- Journal of Electronic Materials
Cross-sectional scanning tunneling microscopy of MBE-grown Si p-n junctions and Si/SiGe superlattices
- E.T. Yu
- M. Johnson
- et al.
- 1993
- Journal of Crystal Growth
Si1-x-yGexCy growth and properties of the ternary system
- A.R. Powell
- K. Eberl
- et al.
- 1993
- Journal of Crystal Growth
Scanning tunneling microscopy and spectroscopy of Si/SiGe(001) superlattices
- E.T. Yu
- J.-M. Halbout
- et al.
- 1992
- Applied Physics Letters
SiCGe ternary alloys - extending Si-based heterostructures
- Subramanian S. Iyer
- K. Eberl
- et al.
- 1992
- Microelectronic Engineering