Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

Date

Start

End

Featured collections

Popular topics

4 results for M.J. Lercel

Inspection and repair of EUV
- - Emily Fisch
  - Louis Kindt
  - et al.
- 2001
- SPIE Photomask 2001
Characterization and lithographic performance of silsesquioxane 193 nm bilayer resists
- - Hiroshi Ito
  - Hoa D. Truong
  - et al.
- 2005
- J. Photopolym. Sci. Tech.
Etching processes and characteristics for the fabrication of refractory x-ray masks
- - Michael J. Lercel
  - Cameron J. Brooks
  - et al.
- 1998
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Chemical and electrical properties of interfaces between deposited insulators and La₂CuO₄
- - A. Levy
  - M.J. Lercel
  - et al.
- 1992
- Journal of Applied Physics