X-ray scattering methods for porosity metrology of low-k thin films
- C.M. Settens
- V.K. Kamineni
- et al.
- 2009
- FCMN 2009
Publications
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4 results for R.J. Matyi
Spectroscopic ellipsometry of porous low-κ dielectric thin films
- V.K. Kamineni
- C.M. Settens
- et al.
- 2009
- FCMN 2009
Structural analysis of as-deposited and annealed low-temperature gallium arsenide
- R.J. Matyi
- M.R. Melloch
- et al.
- 1993
- Journal of Crystal Growth
High resolution x-ray diffraction analysis of annealed low-temperature gallium arsenide
- R.J. Matyi
- M.R. Melloch
- et al.
- 1992
- Applied Physics Letters