Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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1 result for J. Lennart Lindstrfim

Etching of silicon in low-pressure plasmas containing fluorine and oxygen: A comparison of real-time and postplasma surface studies
- - Gottlieb S. Oehrlein
  - Gerrit M.W. Kroesen
  - et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films