Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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5 results for Tomotake Furuhata

A proposal for a conveyance system with parallel cooperative micro modules
- - Hiroyuki Fujita
  - Satoshi Konishi
  - et al.
- 1992
- ETFA 1992
Sub-micron gaps without sub-micron etching
- - T. Furuhata
  - T. Hirano
  - et al.
- 1991
- MEMS 1991
Dry-released nickel micromotors with low-friction bearing structure
- - T. Hirano
  - T. Furuhata
  - et al.
- 1995
- IEICE Transactions on Electronics
Electroplated and dry-released metallic microstructures for a lateral tunneling unit application
- - Toshiki Hirano
  - Dai Kobayashi
  - et al.
- 1994
- Japanese Journal of Applied Physics
Design, fabrication, and operation of submicron gap comb-drive microactuators
- - Toshiki Hirano
  - Tomotake Furuhata
  - et al.
- 1992
- JMEMS