Subsurface microscopy of integrated circuits with apodization and polarization control
- F. Hakan Köklü
- S.B. Ippolito
- et al.
- 2008
- LEOS 2008
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.