Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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1 result for J. Ilavsky

Annealing behavior of atomic layer deposited HfO₂ films studied by synchrotron x-ray reflectivity and grazing incidence small angle scattering
- - M.L. Green
  - A.J. Allen
  - et al.
- 2009
- Journal of Applied Physics