Interhalogen plasma chemistries for dry etch patterning of Ni, Fe, NiFe and NiFeCo thin films
- H. Cho
- K.B. Jung
- et al.
- 1999
- Applied Surface Science
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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35 results for Jeffrey R. Childress
Comparison of Cl2 and F2 based chemistries for the inductively coupled plasma etching of NiMnSb thin films
- J. Hong
- J.A. Caballero
- et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
High density plasma etching of NiFe, NiFeCo and NiMnSb-based multilayers for magnetic storage elements
- K.B. Jung
- J. Hong
- et al.
- 1999
- Applied Surface Science
Magnetic and magneto-optical properties of NiMnSb thin films
- J.A. Caballero
- W.J. Geerts
- et al.
- 1998
- Journal of Magnetism and Magnetic Materials
Magneto-optical properties of sputter-deposited NiMnSb thin films
- J.A. Caballero
- W.J. Geerts
- et al.
- 1997
- Applied Physics Letters