Metal-induced dopant (boron and phosphorus) activation process in amorphous germanium for monolithic three-dimensional integration
- Jin-Hong Park
- Munehiro Tada
- et al.
- 2009
- Journal of Applied Physics
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.