Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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1 result for P. Jiang

Studies of fluorocarbon film deposition and its correlation with etched trench sidewall angle by employing a gap structure using C₄F ₈Ar and CF₄/H₂ based capacitively coupled plasmas
- - Li Ling
  - X. Hua
  - et al.
- 2008
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures