Local strain distributions in silicon-on-insulator/stressor-film composites
- Özgür Kalenci
- Conal E. Murray
- et al.
- 2008
- Journal of Applied Physics
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3 results for O. Kalenci
Submicron mapping of silicon-on-insulator strain distributions induced by stressed liner structures
- Conal E. Murray
- K.L. Saenger
- et al.
- 2008
- Journal of Applied Physics
Synchrotron microbeam x-ray radiation damage in semiconductor layers
- Sean M. Polvino
- Conal E. Murray
- et al.
- 2008
- Applied Physics Letters