SiCOH dielectrics: From low-κ to Ultralow-κ by PECVD
- A. Grill
- D. Edelstein
- et al.
- 2001
- ADMETA 2001
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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155 results for Alfred Grill
Strain relaxation mechanisms in He+-implanted and annealed Si1-xGex layers on Si(001) substrates
- S. Christiansen
- P.M. Mooney
- et al.
- 2001
- MRS Proceedings 2001
From tribological coatings to low-k dielectrics for ULSI interconnects
- A. Grill
- 2001
- Thin Solid Films
Strained Si NMOSFETs for high performance CMOS technology
- K. Rim
- S.J. Koester
- et al.
- 2001
- VLSI Technology 2001
Bottom electrode effects in controlling orientation of lead zirconate titanate films deposited by chemical solution deposition
- Deborah A. Neumayer
- Katherine L. Saenger
- et al.
- 1999
- MRS Proceedings 1999
Novel low-k dual-phase materials prepared by PECVD
- A. Grill
- V.V. Patel
- 2000
- MRS Proceedings 2000
Diamond-like carbon coatings for vacuum and space tribology
- C. Donnet
- T. Le Mogne
- et al.
- 1997
- ESA SP
Bonding, interfacial effects and adhesion in dlc
- A. Grill
- B.S. Meyerson
- et al.
- 1989
- Proceedings of SPIE 1989
Temperature and Bias Effects on the Physical and Tribological Properties of Diamond-Like Carbon
- A. Grill
- V.V. Patel
- et al.
- 2019
- JES
Extreme-low k porous pSiCOH dielectrics prepared by PECVD
- H. You
- Petra Mennell
- et al.
- 2018
- JVSTB