Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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30 results for Eric K. Lin

X-ray absorption spectroscopy to probe interfacial issues in photolithography
- - Joseph L. Lenhart
  - Daniel A. Fischer
  - et al.
- 2003
- Microlithography 2003
Polyelectrolyte effects in model photoresist developer solutions: Roles of base concentration and added salts
- - Vivek M. Prabhu
  - Ronald L. Jones
  - et al.
- 2003
- Microlithography 2003
Effect of porogen molecular architecture and loading on structure of porous thin films
- - Hae-Jeong Lee
  - Christopher L. Soles
  - et al.
- 2008
- Chemistry of Materials
Direct measurement of the counterion distribution within swollen polyelectrolyte films
- - Vivek M. Prabhu
  - Bryan D. Vogt
  - et al.
- 2005
- Langmuir
X-ray absorption spectroscopy to probe surface composition and surface deprotection in photoresist films
- - Joseph L. Lenhart
  - Daniel A. Fischer
  - et al.
- 2005
- Langmuir
Water immersion of model photoresists: Interfacial influences on water concentration and surface morphology
- - Bryan D. Vogt
  - Christopher L. Soles
  - et al.
- 2005
- Journal of Microlithography, Microfabrication and Microsystems
Small angle x-ray scattering metrology for sidewall angle and cross section of nanometer scale line gratings
- - Tengjiao Hu
  - Ronald L. Jones
  - et al.
- 2004
- Journal of Applied Physics
Formation of deprotected fuzzy blobs in chemically amplified resists
- - Ronald L. Jones
  - Tengjiao Hu
  - et al.
- 2004
- Journal of Polymer Science, Part B: Polymer Physics
Interfacial effects on moisture absorption in thin polymer films
- - Bryan D. Vogt
  - Christopher L. Soles
  - et al.
- 2004
- Langmuir
Structural characterization of porous low-k thin films prepared by different techniques using x-ray porosimetry
- - Hae-Jeong Lee
  - Christopher L. Soles
  - et al.
- 2004
- Journal of Applied Physics