Three-dimensional imaging of nano-voids in copper interconnects using incoherent bright field (IBF) tomography
- P.A. Ercius
- D.A. Muller
- et al.
- 2006
- M&M 2006
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
Date
Featured collections
Popular topics
3 results for Matthew Weyland
Three-dimensional imaging of nano-voids in copper interconnects using incoherent bright field (IBF) tomography
- Peter Ercius
- David A. Muller
- et al.
- 2006
- AMC 2006
Three-dimensional imaging of nanovoids in copper interconnects using incoherent bright field tomography
- Peter Ercius
- Matthew Weyland
- et al.
- 2006
- Applied Physics Letters