Thermal ammonia nitridation on HfO2 and hafnium silicates thin films
- J.-J. Ganem
- I. Trimaille
- et al.
- 2006
- Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.