Cross section and critical dimension metrology in dense high aspect ratio patterns with CD-SAXS
- Ronald L. Jones
- Eric K. Lin
- et al.
- 2005
- International Conference on Characterization and Metrology for ULSI Technology 2005
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This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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2 results for Denis Keane
Small angle x-ray scattering metrology for sidewall angle and cross section of nanometer scale line gratings
- Tengjiao Hu
- Ronald L. Jones
- et al.
- 2004
- Journal of Applied Physics