Mechanistic studies of the acidolysis reactions occurring in silicon-containing bilayer photoresists
- Ilya Zharov
- Josef Michl
- et al.
- 2002
- Chemistry of Materials
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2 results for Ilya Zharov
C-Hydroxydicarba-closo-dodecaboranes
- Ilya Zharov
- Anil Saxena
- et al.
- 1997
- Inorganic Chemistry