Kinetics of chemically amplified resists
- G.M. Wallraff
- W.D. Hinsberg
- et al.
- 1995
- Microlithography 1995
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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3 results for D.A. Hopper
Perfluoropolyether characterization by nuclear magnetic resonance spectroscopy and gel permeation chromatography
- Tom Karis
- B. Marchon
- et al.
- 2002
- Journal of Fluorine Chemistry
Oxidation chemistry of a pentaerythritol tetraester oil
- Tom Karis
- J.L. Miller
- et al.
- 1999
- Tribology Transactions