Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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2 results for X. Su

Quantitative metrology study of Cu/SiO₂ interconnect structures using fluorescence x-ray microscopy
- - Guangyong Xu
  - X. Su
  - et al.
- 2001
- Applied Physics Letters
Quantitative nanoscale metrology study of Cu/SiO₂ interconnect technology using transmission x-ray microscopy
- - X. Su
  - C.B. Stagarescu
  - et al.
- 2000
- Applied Physics Letters