Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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4 results for Narayan Sundararajan

Polymer platform dependent characteristics of 193 nm photoresists
- - Juliann Opitz
  - R.D. Allen
  - et al.
- 1999
- SPIE Advances in Resist Technology and Processing 1999
Diffusion and distribution studies of photoacid generators: Ion beam analysis in lithography
- - Narayan Sundararajan
  - Christopher F. Keimel
  - et al.
- 1999
- J. Photopolym. Sci. Tech.
Diffusion and distribution of photoacid generators in thin polymer films
- - Qinghuang Lin
  - Marie Angelopoulos
  - et al.
- 2000
- Materials Research Society Symposium - Proceedings
Supercritical CO₂ processing for submicron imaging of fluoropolymers
- - Narayan Sundararajan
  - Shu Yang
  - et al.
- 1999
- Chemistry of Materials