Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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1 result for Ferdinand H. Bell

Fluorocarbon high density plasmas. VII. Investigation of selective SiO₂-to-Si₃N₄ high density plasma etch processes
- - Ying Zhang
  - Gottlieb S. Oehrlein
  - et al.
- 1996
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films