Inductively coupled plasma etching of CoFeB, CoZr, CoSm and FeMn thin films in interhalogen mixtures
- H. Cho
- K.B. Jung
- et al.
- 1999
- Materials Science and Engineering B: Solid-State Materials for Advanced Technology
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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2 results for R. Rani
Magneto-optical studies of Sm(Fe,Ti)12 perpendicular textured sputtered films
- F.J. Cadieu
- A. Navarathna
- et al.
- 1993
- Journal of Applied Physics