Templating nanopores into poly(methylsilsesquioxane): new low-dielectric coatings suitable for microelectronic applications
- J. Remenar
- C.J. Hawker
- et al.
- 1998
- MRS Spring Meeting 1998
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.