Deep reactive ion etching of silicon and diamond for the fabrication of planar refractive hard X-ray lenses
- B. Nöhammer
- C. David
- et al.
- 2003
- Microelectronic Engineering
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.