Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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1 result for J.S. Lechaton

In-situ CI ₂ thermal etching of GaAs/AiGaAs for damage removal in a plasma etcher
- - J.S. Lechaton
  - P. Buchmann
  - et al.
- 1991
- IEE/LEOS Summer Topical Meetings 1991