Critical aspects of layer transfer and alignment tolerances for 3D integration processes
- D.C. La Tulipe
- L.T. Shi
- et al.
- 2006
- GBC 2006
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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42 results for Deborah Neumayer
Carbon nanotubes as potential building blocks for future nanoelectronics
- J. Appenzeller
- R. Martel
- et al.
- 2002
- Microelectronic Engineering
Control of bismuth volatility in SBT by vanadium doping
- Robert Barz
- Deborah A. Neumayer
- et al.
- 2000
- International Symposium on Integrated Ferroelectrics 2000
Electrodes and barriers for dram and feram: Processing, integration, and fundamentals
- K.L. Saenger
- P.C. Andricacos
- et al.
- 2001
- MRS Online Proceedings Library
Bottom electrode effects in controlling orientation of lead zirconate titanate films deposited by chemical solution deposition
- Deborah A. Neumayer
- Katherine L. Saenger
- et al.
- 1999
- MRS Proceedings 1999
Optimizing fabrication of buried oxide channel field effect transistors
- A.G. Schrott
- J. Misewich
- et al.
- 2000
- MRS Proceedings 2000
Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low Te plasma sources
- Ashish Jagtiani
- Hiroyuki Miyazoe
- et al.
- 2016
- JVSTA
Silicon nitride gate dielectrics and band gap engineering in graphene layers
- Wenjuan Zhu
- Deborah Neumayer
- et al.
- 2010
- Nano Letters
Preparation and structure of porous dielectrics by plasma enhanced chemical vapor deposition
- S. Gates
- D. Neumayer
- et al.
- 2007
- Journal of Applied Physics
Evidence of electron and hole inversion in GaAs metal-oxide-semiconductor capacitors with HfO 2 gate dielectrics and α-Si/SiO 2 interlayers
- S.J. Koester
- E.W. Kiewra
- et al.
- 2006
- Applied Physics Letters