Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

Date

Start

End

Featured collections

Popular topics

72 results for Stephen M. Gates

Decomposition mechanisms of SiH_x species on Si(100)-(2×1) for x=2, 3, and 4
- - S. Gates
  - C.M. Greenlief
  - et al.
- 1990
- The Journal of Chemical Physics
Surface reactions in Si chemical vapor deposition from silane
- - S.K. Kuikarni
  - H.H. Sawin
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Absolute coverage and decomposition kinetics of Mono-, Di-, and tri-hydride phases on Si(111)-(7×7)
- - C.M. Greenlief
  - S. Gates
  - et al.
- 1989
- Chemical Physics Letters
Interaction of Si2H6 with a Si(111)-77 surface
- - R. Imbihl
  - J.E. Demuth
  - et al.
- 1989
- Physical Review B
Reactive sticking coefficient of silane on the Si(111)-(7×7) Surface
- - S. Gates
  - C.M. Greenlief
  - et al.
- 1989
- Chemical Physics Letters
Silicon hydride etch products from the reaction of atomic hydrogen with Si(100)
- - Stephen M. Gates
  - Roderick R. Kunz
  - et al.
- 1989
- Surface Science
Reaction kinetics of surface silicon hydrides
- - C. Michael Greenlief
  - Stephen M. Gates
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Adsorption kinetics of SiH₄, Si₂H₆ and Si₃H₈ on the Si(111)-(7×7) surface
- - Stephen M. Gates
- 1988
- Surface Science
Summary Abstract’ Integrated system for studies of thln-film chemical growth processes on silicon wafers
- - M. Liehr
  - S. Gates
  - et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Chernisorption of silanes on the Si(111)-(7x7) surface
- - S. Gates
  - B.A. Scott
  - et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films