Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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1 result for Abhishek Gottipati

Sensitivity analysis and line edge roughness determination of 28-nm pitch silicon fins using Mueller matrix spectroscopic ellipsometry-based optical critical dimension metrology
- - Dhairya Dixit
  - Samuel O'Mullane
  - et al.
- 2015
- J. Micro/Nanolithogr. MEMS MOEMS