Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films
- T. Rajagopalan
- B. Lahlouh
- et al.
- 2003
- Applied Physics Letters
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.