Nanoscale silicon-on-insulator deformation induced by stressed liner structures
- Conal E. Murray
- Andrew Ying
- et al.
- 2011
- Journal of Applied Physics
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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116 results for Conal Murray
Manipulating stress in Cu/low-k dielectric nanocomposites
- Conal E. Murray
- Paul R. Besser
- et al.
- 2011
- Applied Physics Letters
Triaxial stress distributions in Cu/low-k interconnect features
- Conal E. Murray
- Paul R. Besser
- et al.
- 2011
- Applied Physics Letters
Stress gradients observed in Cu thin films induced by capping layers
- Conal E. Murray
- Paul R. Besser
- et al.
- 2011
- Journal of Materials Research
Exploitation of a self-limiting process for reproducible formation of ultrathin Ni1-x Ptx silicide films
- Zhen Zhang
- Bin Yang
- et al.
- 2010
- Applied Physics Letters
Alpha-particle emission energy spectra from materials used for solder bumps
- Michael S. Gordon
- Kenneth P. Rodbell
- et al.
- 2010
- IEEE TNS
Heteroepitaxial silicon film growth at 600 °c from an Al-Si eutectic melt
- P. Chaudhari
- Heejae Shim
- et al.
- 2010
- Thin Solid Films
In situ evolution of stress gradients in Cu films induced by capping layers
- Conal E. Murray
- Paul R. Besser
- et al.
- 2010
- Applied Physics Letters
Modeling of kinematic diffraction from a thin silicon film illuminated by a coherent, focused X-ray nanobeam
- Andrew Ying
- Braxton Osting
- et al.
- 2010
- Journal of Applied Crystallography
Modeling of alpha-induced single event upsets for 45 nm node SOI devices using realistic C4 and 3D circuit geometries
- Henry H. K. Tang
- Conal E. Murray
- et al.
- 2009
- IEEE TNS