Stress determination in nickel monosilicide films using x-ray diffraction
- Conal E. Murray
- Zhen Zhang
- et al.
- 2009
- Journal of Applied Physics
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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116 results for Conal Murray
A rigorous comparison of X-ray diffraction thickness measurement techniques using silicon-on-insulator thin films
- Andrew J. Ying
- Conal E. Murray
- et al.
- 2009
- Journal of Applied Crystallography
Tomographic study of atomic-scale redistribution of platinum during the silicidation of Ni0.95 Pt0.05 /Si (100) thin films
- Praneet Adusumilli
- Lincoln J. Lauhon
- et al.
- 2009
- Applied Physics Letters
Strain measured in a silicon-on-insulator, complementary metal-oxide-semiconductor device channel induced by embedded silicon-carbon source/drain regions
- Conal E. Murray
- Z. Ren
- et al.
- 2009
- Applied Physics Letters
Stress gradients induced in Cu films by capping layers
- Conal E. Murray
- Paul R. Besser
- et al.
- 2008
- Applied Physics Letters
Mechanical behavior of stressed films on anisotropic substrates
- Conal E. Murray
- K.L. Saenger
- 2008
- Journal of Applied Physics
Local strain distributions in silicon-on-insulator/stressor-film composites
- Özgür Kalenci
- Conal E. Murray
- et al.
- 2008
- Journal of Applied Physics
Backscattered electron imaging in the scanning electron microscope: The use of either: (A) high incident energy or (b) an array detector
- L. Gignac
- O.C. Wells
- et al.
- 2008
- Microscopy and Microanalysis
Submicron mapping of silicon-on-insulator strain distributions induced by stressed liner structures
- Conal E. Murray
- K.L. Saenger
- et al.
- 2008
- Journal of Applied Physics
New simulation methodology for effects of radiation in semiconductor chip structures
- Henry H.K. Tang
- Conal E. Murray
- et al.
- 2008
- IBM J. Res. Dev