Resist requirements and limitations for nanoscale electron-beam patterning
- J. Alexander Liddle
- Gregg M. Gallatin
- et al.
- 2002
- MRS Proceedings 2002
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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3 results for James A. Liddle
Roadmap on emerging hardware and technology for machine learning
- Karl Berggren
- Qiangfei Xia
- et al.
- 2020
- Nanotechnology
10-nm channel length pentacene transistors
- Josephine B. Lee
- Paul C. Chang
- et al.
- 2005
- IEEE Transactions on Electron Devices