Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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45 results for M. Gribelyuk

Thermal stability of HfN compounds on HfO₂/SiO₂ gate stacks
- - A.C. Callegari
  - M. Gribelyuk
  - et al.
- 2006
- ECS Meeting 2006
High performance 65 nm SOI technology with dual stress liner and low capacitance SRAM cell
- - E. Leobandung
  - H. Nayakama
  - et al.
- 2005
- VLSI Technology 2005
Optimization of high κ gate stacks with poly-Si, FUSI and metal electrodes
- - R. Jammy
  - V. Narayanan
  - et al.
- 2005
- ISTC 2005
Fabrication, device design and mobility enhancement of germanium channel MOSFETs
- - Huiling Shang
  - E. Gousev
  - et al.
- 2004
- ICSICT 2004
Systematic study of pFET V_t with Hf-based gate stacks with poly-Si and FUSI gates
- - E. Cartier
  - V. Narayanan
  - et al.
- 2004
- VLSI Technology 2004
Dual work function metal gate CMOS using CVD metal electrodes
- - V. Narayanan
  - A.C. Callegari
  - et al.
- 2004
- VLSI Technology 2004
Ultrathin HfO₂ films grown on silicon by atomic layer deposition for advanced gate dielectrics applications
- - E. Gusev
  - C. Cabral Jr.
  - et al.
- 2003
- Microelectronic Engineering
Ultrathin high-K metal oxides on silicon: Processing, characterization and integration issues
- - E. Gusev
  - E. Cartier
  - et al.
- 2001
- Microelectronic Engineering
A comparison of grain size measurements in Al-Cu thin films: Imaging verses diffraction techniques
- - Lynne Gignac
  - C.E. Murray
  - et al.
- 2002
- Microscopy and Microanalysis
Mechanism of V_FB / V_TH shift in Dysprosium incorporated HfO₂ gate dielectric n-Type Metal-Oxide-Semiconductor devices
- - Tackhwi Lee
  - Kisik Choi
  - et al.
- 2011
- Journal of Vacuum Science and Technology B