Process optimization through model based SRAF printing prediction
- Ramya Viswanathan
- Jaione Tirapu Azpiroz
- et al.
- 2012
- SPIE Advanced Lithography 2012
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.