Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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4 results for Paul Brabant

Gas source depletion study of high-order silanes of silicon-based epitaxial layers grown with RPCVD and low temperatures
- - Keith Chung
  - Paul Brabant
  - et al.
- 2012
- ECS Meeting 2012
Thermal budget reduction and throughput enhancement for CMOS Epi stressors via wet clean interface contamination evaluation and control
- - Paul Brabant
  - Keith Chung
  - et al.
- 2011
- ASMC 2011
High strain embedded-SiGe via low temperature reduced pressure chemical vapor deposition
- - Hong He
  - Paul Brabant
  - et al.
- 2012
- Thin Solid Films
Gas phase particle formation and elimination on Si (100) in low temperature reduced pressure chemical vapor deposition silicon-based epitaxial layers
- - Manabu Shinriki
  - Keith Chung
  - et al.
- 2012
- Thin Solid Films