X-ray lithography: Status, challenges, and outlook for 0.13 μm
- Jerome P. Silverman
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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15 results for J. Silverman
Operating experience with the Helios compact storage ring at IBM
- J. Silverman
- Chas N. Archie
- et al.
- 1994
- Nuclear Inst. and Methods in Physics Research, A
Fully scaled 0.5 μm MOS circuits by synchrotron radiation X-ray lithography: Devices fabrication and overlay evaluation
- J. Silverman
- V. Dimilia
- et al.
- 1989
- Microelectronic Engineering
Polymethyl methacrylate resist sensitivity enhancement in x-ray lithography by in situ polymerization
- W.-T. Liu
- J.C. Corelli
- et al.
- 1984
- Applied Physics Letters
Synchrotrom radiation X-ray lithography
- R.P. Haelbich
- J. Silverman
- et al.
- 1984
- Nuclear Instruments and Methods In Physics Research