Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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56 results for Joy Y. Cheng

Customization and design of directed self-assembly using hybrid prepatterns
- - Joy Y. Cheng
  - Gregory S. Doerk
  - et al.
- 2015
- SPIE Advanced Lithography 2015
Self-aligned line-space pattern customization with directed self-assembly graphoepitaxy at 24nm pitch
- - Hsinyu Tsai
  - Hiroyuki Miyazoe
  - et al.
- 2015
- SPIE Advanced Lithography 2015
Computational lithography platform for 193i-guided directed self-assembly
- - Kafai Lai
  - Melih Ozlem
  - et al.
- 2014
- SPIE Advanced Lithography 2014
Towards electrical testable soi devices using directed self-assembly for fin formation
- - Chi Chun Liu
  - Cristina Estrada-Raygoza
  - et al.
- 2014
- SPIE Advanced Lithography 2014
Pattern transfer of directed self-assembly (DSA) patterns for CMOS device applications
- - Hsin-Yu Tsai
  - Hiroyuki Miyazoe
  - et al.
- 2013
- SPIE Advanced Lithography 2013
Directed self-assembly process implementation in a 300mm pilot line environment
- - Chi-Chun Liu
  - I. Cristina Estrada-Raygoza
  - et al.
- 2013
- SPIE Advanced Lithography 2013
Deterministically isolated gratings through the directed self-assembly of block copolymers
- - Gregory Sadasdf Doerk
  - Joy Y. Cheng
  - et al.
- 2013
- SPIE Advanced Lithography 2013
Computational aspects of optical lithography extension by Directed Self-Assembly
- - Kafai Lai
  - Chi-Chun Liu
  - et al.
- 2013
- SPIE Advanced Lithography 2013
Measurement of placement error between self-assembled polymer patterns and guiding chemical prepatterns
- - Gregory S. Doerk
  - Chi-Chun Liu
  - et al.
- 2012
- SPIE Advanced Lithography 2012
Progress towards the integration of optical proximity correction and directed self-assembly of block copolymers with graphoepitaxy
- - Chi-Chun Liu
  - Jed Pitera
  - et al.
- 2012
- SPIE Advanced Lithography 2012