Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

Date

Start

End

Featured collections

Popular topics

4 results for Vito Dai

22 nm technology node active layer patterning for planar transistor devices
- - Ryoung-Han Kim
  - Steven Holmes
  - et al.
- 2009
- SPIE Advanced Lithography 2009
Overcoming the challenges of 22-nm node patterning through litho-design co-optimization
- - Martin Burkharde
  - J.C. Arnold
  - et al.
- 2009
- SPIE Advanced Lithography 2009
32 NM Logic patterning options with immersion lithography
- - K. Lai
  - S. Burns
  - et al.
- 2008
- SPIE Advanced Lithography 2008
22-nm-node technology active-layer patterning for planar transistor devices
- - Ryoung-Han Kim
  - Steven Holmes
  - et al.
- 2010
- J. Micro/Nanolithogr. MEMS MOEMS