Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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89 results for Eric Kay

Plasma polymerization
- - E. Kay
- 2010
- Berichte der Bunsengesellschaft/Physical Chemistry Chemical Physics
Ion implantation during film growth and its effect on the superconducting properties of niobium
- - G. Heim
  - Eric Kay
- 2008
- Journal of Applied Physics
Elemental composition profiling in thin films by glow-discharge mass spectrometry: Depth resolution
- - J.W. Coburn
  - E.W. Eckstein
  - et al.
- 2008
- Journal of Applied Physics
Plasma etching a "pseudo-black-box" approach
- - Harold F. Winters
  - J.W. Coburn
  - et al.
- 2008
- Journal of Applied Physics
Band and hopping conduction in high-resistivity ZnO
- - J. Schoenes
  - K.K. Kanazawa
  - et al.
- 2008
- Journal of Applied Physics
Conduction mechanism in plasma-polymerized tetrafluoroethylene films
- - U. Hetzler
  - Eric Kay
- 2008
- Journal of Applied Physics
Model of bias sputtering applied to the control of nb film properties
- - Eric Kay
  - Gunther Heim
- 2008
- Journal of Applied Physics
Metal-containing fluoropolymer films produced by simultaneous plasma etching and polymerization: Effects of hydrogen or oxygen
- - E. Kay
  - A. Dilks
  - et al.
- 2008
- Journal of Applied Physics
A method for increasing the etch-rate ratio of oxides to nonoxides in inert-gas ion milling processes
- - U. Gerlach-Meyer
  - J.W. Coburn
  - et al.
- 2008
- Journal of Applied Physics
Tetrafluoromethane Injected into a dc Argon Glow Discharge
- - J.W. Coburn
  - Eric Kay
- 2006
- Journal of Macromolecular Science: Part A - Chemistry