Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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38 results for M. Hatzakis

Electron beam processing systems (a state of the art review)
- - M. Hatzakis
- 2004
- Polymer Engineering & Science
Poly(4‐chlorostyrene), a new high contrast negative E‐beam resist
- - J. Liutkus
  - M. Hatzakis
  - et al.
- 2004
- Polymer Engineering & Science
Organosilicon polymers for lithographic applications
- - J.M. Shaw
  - M. Hatzakis
  - et al.
- 2004
- Polymer Engineering & Science
Epoxy resins for deep UV lithography
- - K.J. Stewart
  - M. Hatzakis
  - et al.
- 2004
- Polymer Engineering & Science
New method of observing electron penetration profiles in solids
- - M. Hatzakis
- 2003
- Applied Physics Letters
1.75-GHz acoustic-surface-wave transducer fabricated by an electron beam
- - A.N. Broers
  - E.G. Lean
  - et al.
- 2003
- Applied Physics Letters
Scanning differential interferometer to measure index heterogeneity
- - Norman Bobroff
  - Alan E. Rosenbluth
  - et al.
- 1992
- Applied Optics
New High-Resolution and High-Sensitivity Deep UV, X-Ray, and Electron-Beam Resists
- - M. Hatzakis
  - K.J. Stewart
  - et al.
- 1991
- JES
New high resolution and high sensitivity deep UV, x-ray, and electron beam resists
- - Michael Hatzakis
  - Kevin J. Stewart
  - et al.
- 1990
- Microelectronic Engineering
A simple bilayer lift-off process
- - David F. Witman
  - Jane M. Shaw
  - et al.
- 1990
- Microelectronic Engineering