Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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14 results for T.H.P. Chang

Scanning x-ray microscope with 75-nm resolution
- - H. Rarback
  - D. Shu
  - et al.
- 1988
- Review of Scientific Instruments
Zone plate lenses for X-ray microscopy
- - Y. Vladimirsky
  - D. Kern
  - et al.
- 1988
- Nuclear Inst. and Methods in Physics Research, A
1 μm MOSFET VLSI Technology: Part VI—Electron-Beam Lithography
- - Warren D. Grobman
  - Hans E. Luhn
  - et al.
- 1979
- IEEE T-ED
Instrumentation for electron beam lithography
- - T.H.P. Chang
- 1974
- IEEE Transactions on Magnetics