Properties of SiO2 Grown in the Presence of HCl or Cl2
- Y.J. van der Meulen
- C.M. Osburn
- et al.
- 2019
- JES
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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8 results for Y.J. van der Meulen
Silicon Oxidation Studies: Analysis of SiO2 Film Growth Data
- E.A. Irene
- Y.J. van der Meulen
- 2019
- JES
Auger and ellipsometric study of phosphorus segregation in oxidized degenerate silicon
- N.J. Chou
- Y.J. Van Der Meulen
- et al.
- 2014
- Japanese Journal of Applied Physics
Auger analysis of chlorine in "hCl- or Cl2-grown" SiO2 films
- N.J. Chou
- C.M. Osburn
- et al.
- 2003
- Applied Physics Letters
Auger and ellipsometric study of phosphorus segregation in oxidized degenerate silicon
- N.J. Chou
- Y.J. Van Der Meulen
- et al.
- 2003
- Applied Physics Letters
Effects of HCl and Cl2 additions on silicon oxidation kinetics
- Y.J. van der Meulen
- J.G. Cahill
- 1974
- Journal of Electronic Materials
Preparation and properties of silicon-cadmium selenide p-n heterojunctions
- Y.J. van der Meulen
- J.G. Cahill
- et al.
- 1972
- Thin Solid Films
Analysis of ultrathin oxide growth on indium
- J.M. Eldridge
- Y.J. Van der Meulen
- et al.
- 1972
- Thin Solid Films