Auger and ellipsometric study of phosphorus segregation in oxidized degenerate silicon
- N.J. Chou
- Y.J. Van Der Meulen
- et al.
- 2014
- Japanese Journal of Applied Physics
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.