Electromigration in two-level interconnect structures with Al alloy lines and W studs
- C.-K. Hu
- P.S. Ho
- et al.
- 1992
- Journal of Applied Physics
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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42 results for M.B. Small
Dry etching of TiN/Al(Cu)/Si for very large scale integrated local interconnections
- K.W. Choi
- N.J. Mazzeo
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
On-chip wiring for VLSI. Status and directions
- M.B. Small
- D.J. Pearson
- 1990
- IBM J. Res. Dev
A process for improved Al (Cu) reactive ion etching
- C.-K. Hu
- B. Canney
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Reversal in the growth or dissolution of III-V heterostructures by liquid phase epitaxy
- M.B. Small
- R. Ghez
- 1984
- Journal of Applied Physics
Noise Properties of Semiconductor Lasers Due to Optical Feedback
- Kristian E. Stubkjaer
- Martin B. Small
- 1984
- IEEE JQE
Shallow zinc diffusion in liquid phase epitaxial GaAs and (GaAl)As at 600°C
- S.E. Blum
- M.B. Small
- et al.
- 1983
- Applied Physics Letters
Feedback-induced noise in index-guided semiconductor lasers and its reduction by modulation
- K. Stubkjaer
- M.B. Small
- 1983
- Electronics Letters
Correlated DLTS and EPR measurements of defects in As-grown and electron irradiated p-type GaP
- P.M. Mooney
- T.A. Kennedy
- et al.
- 1983
- Physica B+C
Contact angles between (GaAl)As solid and solutions
- R.M. Potemski
- M.B. Small
- 1983
- Journal of Crystal Growth