Effects of electron-beam irradiation on the properties of CVD Si 3N4 films in MNOS structures
- T.P. Ma
- B.H. Yun
- et al.
- 2008
- Journal of Applied Physics
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.