Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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221 results at Microelectronic Engineering

Micromechanics: A toolbox for femtoscale science: "Towards a laboratory on a tip"
- - R. Berger
  - Ch. Gerber
  - et al.
- 1997
- Microelectronic Engineering
Magnetic tunnel junctions fabricated at tenth-micron dimensions by electron beam lithography
- - S. Rishton
  - Y. Lu
  - et al.
- 1997
- Microelectronic Engineering
Reliability and integration of ultra-thin gate dielectrics for advanced CMOS
- - D.A. Buchanan
  - S.H. Lo
- 1997
- Microelectronic Engineering
Light emission during direct and Fowler-Nordheim tunneling in ultra thin MOS tunnel junctions
- - E. Cartier
  - J.C. Tsang
  - et al.
- 1997
- Microelectronic Engineering
Defect instability in ultra-thin oxides on silicon
- - L. Xie
  - K.R. Farmer
  - et al.
- 1997
- Microelectronic Engineering
Submicrometer p-Type SiGe modulation-doped field-effect transistors for high speed applications
- - I. Adesida
  - M. Arafa
  - et al.
- 1997
- Microelectronic Engineering
A new positive DUV photoresist optimized for 0.25 μm isolated lines
- - T. Lindsay
  - G.G. Barclay
  - et al.
- 1997
- Microelectronic Engineering
Microcolumn based low energy e-beam writing
- - C. Stebler
  - M. Despont
  - et al.
- 1996
- Microelectronic Engineering
Electron beam technology - SEM to microcolumn
- - T.H.P. Chang
  - M.G.R. Thomson
  - et al.
- 1996
- Microelectronic Engineering
The nanoworld: Chances and challenges
- - Heinrich Rohrer
- 1996
- Microelectronic Engineering