Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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14 results at Microlithography 1994

0.25-μm lithography development using positive mode top surface imaging photoresist
- - Douglas C. La Tulipe
  - John P. Simons
  - et al.
- 1994
- Microlithography 1994
Materials evaluation of antireflective coatings for single-layer 193-nm lithography
- - Roderick R. Kunz
  - Robert D. Allen
- 1994
- Microlithography 1994
Use of scatterometric latent image detector in closed loop feedback control of linewldth
- - John Sturtevant
  - Steve Holmes
  - et al.
- 1994
- Microlithography 1994
Optimization of ESCAP photoresist for x-ray lithography
- - A.T.S. Pomerene
  - K.E. Petrillo
  - et al.
- 1994
- Microlithography 1994