Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

Date

Start

End

Featured collections

Popular topics

22 results at Microlithography 1993

170 nm gates fabricated by phase-shift mask and top anti-reflector process
- - T.A. Brunner
  - P.N. Sanda
  - et al.
- 1993
- Microlithography 1993
Comparison of scalar and vector diffraction modelling for deep-UV lithography
- - Bruce W. Smith
  - Donis G. Flagello
  - et al.
- 1993
- Microlithography 1993
TAR processing for CD control in I-line and 248 nm lithography
- - Christopher Lyons
  - Nicholas Eib
  - et al.
- 1993
- Microlithography 1993
Rim phase-shift mask combined with off-axis illumination: A path to 0.5Λ/NA geometries
- - T.A. Brunner
- 1993
- Microlithography 1993
Vector diffraction analysis of phase-mask imaging in photoresist films
- - Donis G. Flagello
  - Alan E. Rosenbluth
- 1993
- Microlithography 1993
Process optimization of APEX-E
- - Karen Petrillo
- 1993
- Microlithography 1993
Post-exposure bake as a process-control parameter for chemically-amplffied photoresist
- - John L. Sturtevant
  - Steven J. Holmes
  - et al.
- 1993
- Microlithography 1993
Developments in 2D AFM metrology
- - Diana Nyyssonen
- 1993
- Microlithography 1993
Process latitude study of focused ion-beam-deposited gold for clear x-ray mask repair
- - Patricia G. Blauner
  - Andrew D. Dubner
  - et al.
- 1993
- Microlithography 1993
Mixed e-beam/optical lithography process for the fabrication of sub-0.25-μm poly gates
- - Keith T. Kwietniak
  - Michael G. Rosenfield
  - et al.
- 1993
- Microlithography 1993