Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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21 results at Sensors and Actuators, A: Physical

Low-cost PDMS seal ring for single-side wet etching of MEMS structures
- - J. Brugger
  - G. Beljakovic
  - et al.
- 1998
- Sensors and Actuators, A: Physical
Fabrication process of high aspect ratio elastic and SU-8 structures for piezoelectric motor applications
- - Laurent Dellmann
  - Sylvian Roth
  - et al.
- 1998
- Sensors and Actuators, A: Physical
High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS
- - H. Lorenz
  - M. Despont
  - et al.
- 1998
- Sensors and Actuators, A: Physical
Characterization of an integrated force sensor based on a MOS transistor for applications in scanning force microscopy
- - Terunobu Akiyama
  - Andreas Tonin
  - et al.
- 1998
- Sensors and Actuators, A: Physical
A solid-state pressure-sensing microsystem for biomedical applications
- - Stavros Chatzandroulis
  - Dimitris Goustouridis
  - et al.
- 1997
- Sensors and Actuators, A: Physical
A 400 °C silicon Hall sensor
- - Sebastiann In't Hout
  - Simon Middelhoek
- 1997
- Sensors and Actuators, A: Physical
Novel miniature integrated optical goniometers
- - Rino E. Kunz
  - Jürg Dübendorfer
- 1997
- Sensors and Actuators, A: Physical
Fabrication of a silicon-Pyrex-silicon stack by a.C. Anodic bonding
- - M. Despont
  - H. Gross
  - et al.
- 1996
- Sensors and Actuators, A: Physical
On the mass sensitivity of acoustic-plate-mode sensors
- - Fabien Josse
  - Reiner Dahint
  - et al.
- 1996
- Sensors and Actuators, A: Physical
Magnetic microactuation of torsional polysilicon structures
- - Jack W. Judy
  - Richard S. Muller
- 1996
- Sensors and Actuators, A: Physical